Hostname: page-component-68945f75b7-jtc8j Total loading time: 0 Render date: 2024-09-04T21:08:32.930Z Has data issue: false hasContentIssue false

Energy Filtered Imaging and Convergent Beam Electron Diffraction (CBED) in the Transmission Electron Microscope (TEM)

Published online by Cambridge University Press:  02 July 2020

A.G. Fox
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, United States Naval Postgraduate SchoolMonterey, California93943
E.S.K. Menon
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, United States Naval Postgraduate SchoolMonterey, California93943
M. Saunders
Affiliation:
Center for Materials Science and Engineering, Department of Mechanical Engineering, United States Naval Postgraduate SchoolMonterey, California93943
Get access

Extract

Over the last ten years TEMs have been developed that are capable of HREM, EDX, PEELS and diffraction using a single objective pole piece. More recently these TEMs have been equipped with the capability of energy filtering the electron beam after it has passed through the sample so that energy filtered images and electron diffraction patterns can be obtained. In this work the use of a Topcon 002B TEM equipped with a GATAN PEELS imaging filter (GIF) to generate zero-loss energy filtered zone axis CBED patterns and elemental images from inelastically scattered electrons will be described. An analysis of this energy filtered data indicates that elemental imaging using the GIF is an informative, but semiquantitative technique, whereas zero-loss energy filtered zone axis CBED patterns can be accurately quantified so that the two lowest-angle x-ray form factors of cubic elements can be measured with errors of the order of 0.1% or less.

Type
Analytical Electron Microscopy
Copyright
Copyright © Microscopy Society of America 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Hofer, F.et al., Ultramicroscopy, 59 (1995) 15.10.1016/0304-3991(95)00015-SCrossRefGoogle Scholar
2.Krivanek, O.L. and Kundmann, M.K., Proceedings of MSA (1995), 271.Google Scholar
3.Reimer, L., Energy-Filtering Transmission Electron Microscopy, (1995)(Springer-Verlag), 347.10.1007/978-3-540-48995-5_7CrossRefGoogle Scholar
4.Saunders, M.et al., Scanning Microscopy Supplement 11, (1996) in pressGoogle Scholar
5. This work was funded by NASA, the Office of Naval Research, Wright-Patterson AFB, the Naval Air Warfare Center, Patuxent River and the Naval Surface Warfare Center, Carderock Division.Google Scholar