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Electron Energy-Loss Spectroscopy of Alternative Gate Dielectric Stacks

Published online by Cambridge University Press:  01 November 2002

S. Stemmer ,
D. Klenov ,
Z. Chen ,
J.-P. Maria ,
A. I. Kingon ,
D. Niu  and
G. N. Parsons
S. Stemmer
Affiliation:
Department of Mechanical Engineering and Materials Science, Rice University, Houston, TX 77005-1892
D. Klenov
Affiliation:
Department of Mechanical Engineering and Materials Science, Rice University, Houston, TX 77005-1892
Z. Chen
Affiliation:
Department of Mechanical Engineering and Materials Science, Rice University, Houston, TX 77005-1892
J.-P. Maria
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919
A. I. Kingon
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919
D. Niu
Affiliation:
Department of Chemical Engineering, North Carolina State University, Raleigh, NC 27695-7905
G. N. Parsons
Affiliation:
Department of Chemical Engineering, North Carolina State University, Raleigh, NC 27695-7905

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 66 - 67
Copyright
Copyright © Microscopy Society of America 2002