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Development of Compact Cs/Cc Corrector with Annular and Circular Electrodes

Published online by Cambridge University Press:  04 August 2017

Tadahiro Kawasaki ,
Ryuji Yoshida ,
Takeharu Kato ,
Tsunenori Nomaguchi ,
Toshihide Agemura ,
Tetsuji Kodama ,
Masahiro Tomita  and
Takashi Ikuta
Tadahiro Kawasaki
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Ryuji Yoshida
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Takeharu Kato
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Tsunenori Nomaguchi
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Toshihide Agemura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Tetsuji Kodama
Affiliation:
Graduate School of Science & Technology, Meijo University, Nagoya, Japan
Masahiro Tomita
Affiliation:
Vacuum Device Ltd., Mito, Japan
Takashi Ikuta
Affiliation:
Faculty of Engineering, Osaka Electro-Communication University, Neyagawa, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 466 - 467
Copyright
© Microscopy Society of America 2017 

References

[1] Haider, M., et al, Optik 99 1995). p. 167.Google Scholar
[2] Krivanek, O. L., et al, Inst. Phys. Conf 153 1997). p. 35.Google Scholar
[3] Kawasaki, T., et al, Suf. Int. Anal 48 2015). p. 1160.Google Scholar
[4] Kawasaki, T., et al PCT/JP2016/053691.Google Scholar