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Development of a Fountain Detector for Spectroscopy of Secondary Electrons in SEM

Published online by Cambridge University Press:  04 August 2017

Toshihide Agemura ,
Hideo Iwai  and
Takashi Sekiguchi
Toshihide Agemura
Affiliation:
National Institute for Materials Science, Nano-Electronics Material Unit, Tsukuba, Japan University of Tsukuba, Graduate School of Pure and Applied Sciences, Tsukuba, Japan
Hideo Iwai
Affiliation:
National Institute for Materials Science, Nano-Electronics Material Unit, Tsukuba, Japan
Takashi Sekiguchi
Affiliation:
National Institute for Materials Science, Nano-Electronics Material Unit, Tsukuba, Japan University of Tsukuba, Graduate School of Pure and Applied Sciences, Tsukuba, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 590 - 591
Copyright
© Microscopy Society of America 2017 

References

[1] Sekiguchi, T. & Iwai, H. Japanese Journal of Applied Physics 54 2015). p. 088001.CrossRefGoogle Scholar