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Development and Application of a New 300kv Omega-Filter Electron Microscope

Published online by Cambridge University Press:  02 July 2020

Y. Bando ,
M. Mitome ,
Y. Kitami ,
K. Kurashima ,
T. Kaneyama ,
Y. Okura  and
M. Naruse
Y. Bando
Affiliation:
National Institute for Research in Inorganic Materials, Tsukuba Ibaraki 305-0044, Japan
M. Mitome
Affiliation:
National Institute for Research in Inorganic Materials, Tsukuba Ibaraki 305-0044, Japan
Y. Kitami
Affiliation:
National Institute for Research in Inorganic Materials, Tsukuba Ibaraki 305-0044, Japan
K. Kurashima
Affiliation:
National Institute for Research in Inorganic Materials, Tsukuba Ibaraki 305-0044, Japan
T. Kaneyama
Affiliation:
JEOL Ltd, 1-2, Musashino 3-chome, Tokyo, 196-8558, Japan
Y. Okura
Affiliation:
JEOL Ltd, 1-2, Musashino 3-chome, Tokyo, 196-8558, Japan
M. Naruse
Affiliation:
JEOL Ltd, 1-2, Musashino 3-chome, Tokyo, 196-8558, Japan
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Extract

It has been already pointed out that the medium voltage microscopes of 300kV to 400kV have some advantages in the analytical capabilities of EDS and EELS as compared to those of 200kV). The P/B ratios and the spatial resolution for the analysis will be improved with the increase of the accelerating voltages as well as lattice resolution. In order to improve the spatial resolution of inelastic filtered images, we have recently developed a new 300 kV omega-filter electron microscope with a field emission gun. In the paper, some characteristic features of the new microscope and its application results are described.

The new microscope have a 300kV field emission gun, an omega-filter, EDS, digital STEM, a slow-scan CCD, an imaging plate and TV camera. Some characteristic features of the new microscope are summarized in Table 1. Based on a calculation of probe diameter as a function of probe current at 300kV in a Shottkey type gun with a brightness of 7xl08A/cm2sr and Cs of 0.6mm, a minimum probe size (FWHM) is estimated to be about 0.2nm (Fig. 1).

Type
Electron Energy-Loss Spectroscopy (EELS) and Imaging
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 200 - 201
Copyright
Copyright © Microscopy Society of America

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References

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