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A Detection System with Controlled Surface Sensitivity for a New UHR SEM

Published online by Cambridge University Press:  04 August 2017

Petr Sytaf ,
Jaroslav Jiruse  and
Jan Paral
Petr Sytaf
Affiliation:
TESCAN Brno s.r.o., Brno, Czech Republic
Jaroslav Jiruse
Affiliation:
TESCAN Brno s.r.o., Brno, Czech Republic
Jan Paral
Affiliation:
TESCAN Brno s.r.o., Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 24 - 25
Copyright
© Microscopy Society of America 2017 

References

[1] Reimer, L in Scanning Electron Microscopy (ed H K V LotschSpringer Verlag Berlinp. 142.Google Scholar
[2] Jaksch, H Proceedings of EMAS 2011 (2011), p. 255.Google Scholar
[3] Luo, T & Khursheed, A Journal of Vacuum Science & Technology B 25 2007). p. 2017.Google Scholar
[4] Aoyama, T, Nagoshib, M & Satoc, K Surface and Interface Analysis 46 2014). p. 1291.CrossRefGoogle Scholar