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Deep Learning-based Automated Measurement Method for Cross-sectional SEM Images in Semiconductor Devices

Published online by Cambridge University Press:  30 July 2020

Yutaka Okuyama  and
Takeshi Ohmori
Yutaka Okuyama
Affiliation:
Hitachi, Ltd., Research & Development Group, Kokubunji, Tokyo, Japan
Takeshi Ohmori
Affiliation:
Hitachi, Ltd., Research & Development Group, Kokubunji, Tokyo, Japan

Abstract

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Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 698 - 700
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Copyright
Copyright © Microscopy Society of America 2020

References

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