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Correlation of Structural Modifications by Multiscale Phase Mapping in Filamentary Type HfO2-based RRAM: Towards a Component Specific in situ TEM Investigation

Published online by Cambridge University Press:  05 August 2019

Alexander Zintler ,
Robert Eilhardt ,
Stefan Petzold ,
Nico Kaiser ,
Sharath Ulhas ,
Lambert Alff  and
Leopoldo Molina-Luna
Alexander Zintler
Affiliation:
Advanced Electron Microscopy, Materials Science, Technische Universität Darmstadt, Germany.
Robert Eilhardt
Affiliation:
Advanced Electron Microscopy, Materials Science, Technische Universität Darmstadt, Germany.
Stefan Petzold
Affiliation:
Advanced Thin Film Technology, Materials Science, Technische Universität Darmstadt, Germany.
Nico Kaiser
Affiliation:
Advanced Thin Film Technology, Materials Science, Technische Universität Darmstadt, Germany.
Sharath Ulhas
Affiliation:
Advanced Thin Film Technology, Materials Science, Technische Universität Darmstadt, Germany.
Lambert Alff
Affiliation:
Advanced Thin Film Technology, Materials Science, Technische Universität Darmstadt, Germany.
Leopoldo Molina-Luna*
Affiliation:
Advanced Electron Microscopy, Materials Science, Technische Universität Darmstadt, Germany.
*
*Corresponding author: [email protected]

Abstract

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Type
In situ TEM of Nanoscale Materials and Electronic Devices for Phase Transformation Studies
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1842 - 1843
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Sharath, SU et al. , Adv. Funct. Mater. 27 (31) (2017).Google Scholar
[2]Waser, R et al. , Adv. Mater. 21 (25–26) (2009), p. 2632.Google Scholar
[3]McKenna, K and Shluger, A, Appl. Phys. Lett. 95 (22) (2009), p. 222111.Google Scholar
[4]Xue, K-H et al. , Appl. Phys. Lett. 102 (20) (2013), p. 201908.Google Scholar
[5]Zintler, A et al. , Ultramicroscopy 181 (2017), p. 144.Google Scholar
[6]The authors acknowledge financial support from the Deutsche Forschungsgemeinschaft (DFG) under research grant MO 3010/3-1 and the European Research Council (ERC) ”Horizon 2020” Program under Grant No. 805359-FOXON.Google Scholar