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Correlation of Joule Heating and Electromigration-induced Mass Transport within Nanoscale Co Interconnects by In Situ STEM

Published online by Cambridge University Press:  30 July 2020

Brian Zutter ,
Matthew Mecklenburg ,
Ho Leung Chan  and
B. C. Regan
Brian Zutter
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States
Matthew Mecklenburg
Affiliation:
University of Southern California, Los Angeles, California, United States
Ho Leung Chan
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States
B. C. Regan
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 152 - 154
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Copyright
Copyright © Microscopy Society of America 2020

References

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This work was supported by SRC NMP 2872.001, NSF STC award DMR-1548924 (STROBE), by NSF award DMR-1611036. Data presented here were acquired at the Core Center of Excellence in Nano Imaging (CNI) at the University of Southern California.Google Scholar