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Considerations and Challenges with Characterizing Si/SiGe Interfaces

Published online by Cambridge University Press:  25 July 2016

Ondrej Dyck ,
Donovan Leonard ,
Jonathan Poplawsky ,
Emily Pritchett ,
Andrey A. Kiselev ,
Clayton A. Jackson  and
Lisa F. Edge
Ondrej Dyck
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Lab, Oak Ridge, TN, USA
Donovan Leonard
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Lab, Oak Ridge, TN, USA
Jonathan Poplawsky
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Lab, Oak Ridge, TN, USA
Emily Pritchett
Affiliation:
HRL Laboratories, LLC., Malibu, CA, USA
Andrey A. Kiselev
Affiliation:
HRL Laboratories, LLC., Malibu, CA, USA
Clayton A. Jackson
Affiliation:
HRL Laboratories, LLC., Malibu, CA, USA
Lisa F. Edge
Affiliation:
HRL Laboratories, LLC., Malibu, CA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 1450 - 1451
Copyright
© Microscopy Society of America 2016 

References

[1] Luna, E., et al., Appl. Phys. Lett. 92, p 141913 (2008).Google Scholar
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[4] Voyles, P. M., et al., Ultramicroscopy 96, p. 251 (2002).Google Scholar