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Cold-Atom Ion Sources for Focused Ion Beam Applications

Published online by Cambridge University Press:  04 August 2017

J.J. McClelland ,
W.R. McGehee ,
V.P. Oleshko ,
C.L. Soles ,
S. Takeuchi ,
O. Kirilov ,
D. Gundlach ,
E. Strelcov ,
N. Zhitenev  and
T. Michels
...Show all authors
J.J. McClelland
Affiliation:
Center for Nanoscale Science and Technology
W.R. McGehee
Affiliation:
Center for Nanoscale Science and Technology
V.P. Oleshko
Affiliation:
Material Measurement Laboratory
C.L. Soles
Affiliation:
Material Measurement Laboratory
S. Takeuchi
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899USA Theiss Research, La Jolla, CA 92037, USA
O. Kirilov
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899USA
D. Gundlach
Affiliation:
Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899USA
E. Strelcov
Affiliation:
Center for Nanoscale Science and Technology Maryland Nanocenter, University of Maryland, College Park, MD 20742, USA
N. Zhitenev
Affiliation:
Center for Nanoscale Science and Technology
T. Michels
Affiliation:
Center for Nanoscale Science and Technology Ilmenau University of Technology, Ilemnau, Germany
V.A. Aksyuk
Affiliation:
Center for Nanoscale Science and Technology
A.V. Steele
Affiliation:
zeroK NanoTech, Gaithersburg, MD 20879USA
A. Schwarzkopf
Affiliation:
zeroK NanoTech, Gaithersburg, MD 20879USA
B. Knuffman
Affiliation:
zeroK NanoTech, Gaithersburg, MD 20879USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 276 - 277
Copyright
© Microscopy Society of America 2017 

References

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