Scanning probe microscopy (SPM) is unique among the imaging techniques in which it provides three-dimensional (3-D) real-space images and among surface analysis techniques in which it allows spatially localized measurements of structure and properties. Under optimum conditions, subatomic spatial resolution is achieved. The development given has not been only because of its ability to obtain topographic and structural images of the surface at micro and nano scale, but also for the possibility of performing analysis of superficial properties such as local adhesion properties, chemical heterogeneity, and local mechanical properties [1]. The SPM has different variations depending on the interaction between the tip and the sample surface, such as AFM, which has the ability of showing topographic characteristics at atomic scale, LFM, which measures local friction differences, FMM and PDM that measure differences of local elasticity. The instrument counts with the spectroscopy mode and with this it is possible to obtain Force — distance (F-d) curves that give information about the local elastic properties of the sample surface. In this work, TiN and ZrN thin films grown by the PAPVD by pulsed arc technique were studied, using the AFM, LFM, FMM, PDM and spectroscopy F vs. d techniques.