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Characterization of strain fields in Si1-xGex island structures by means of quantitative high-resolution electron microscopy

Published online by Cambridge University Press:  05 September 2003

Anh Tuan Tham ,
Reinhard Otto ,
Wolfgang Neumann ,
Herbert Wawra  and
H.P. Strunk
Anh Tuan Tham
Affiliation:
Humboldt University of Berlin, Institute of Physics, Chair of Crystallography, Newtonstr. 15, 12489 Berlin, Germany
Reinhard Otto
Affiliation:
Humboldt University of Berlin, Institute of Physics, Chair of Crystallography, Newtonstr. 15, 12489 Berlin, Germany
Wolfgang Neumann
Affiliation:
Humboldt University of Berlin, Institute of Physics, Chair of Crystallography, Newtonstr. 15, 12489 Berlin, Germany
Herbert Wawra
Affiliation:
Institute of Crystal Growth, Max-Born-Str. 2, 12489 Berlin, Germany
H.P. Strunk
Affiliation:
Friedrich-Alexander-University Nürnberg - Erlangen, Institute of Microcharacterisation, Cauerstraße 6, 91058 Erlangen, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 274 - 275
Copyright
Copyright © Microscopy Society of America 2003

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