Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-23T14:25:18.114Z Has data issue: false hasContentIssue false
  • English
  • Français

Capturing Die Layout of Obsolete ASIC Using Extreme Field of View SEM

Published online by Cambridge University Press:  01 August 2010

J Gazda ,
A Jachniewicz ,
C Sallee  and
R Young
J Gazda
Affiliation:
Cerium Laboratories LLC
A Jachniewicz
Affiliation:
Crossfield Technology Inc
C Sallee
Affiliation:
Smart Imaging Technologies Inc
R Young
Affiliation:
FEI Company

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 618 - 619
Copyright
Copyright © Microscopy Society of America 2010