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AZtec Wave – a New Way to Achieve Combined EDS and WDS Capability on SEM

Published online by Cambridge University Press:  30 July 2020

Simon Burgess  and
Philippe Pinard
Simon Burgess
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, England, United Kingdom
Philippe Pinard
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, England, United Kingdom

Abstract

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Type
Vendor Symposium - Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 114 - 115
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Copyright
Copyright © Microscopy Society of America 2020

References

Collins, C, et al. Microsc. Microanal. 21 S3 (2015), 162710.1017/S1431927615008910CrossRefGoogle Scholar
Pinard, P, et al. Microsc. Microanal. 24 S1 (2018), 72410.1017/S1431927618004117CrossRefGoogle Scholar
Pinard, P, et al. EMAS 2019 Proceedings (2019), 269Google Scholar