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Arrays Produced by Electron Beam Nanolithography from Fe3O4 Compressed Nanoparticles Targets

Published online by Cambridge University Press:  27 August 2014

Geronimo Perez ,
Elisa Maria Baggio Satovitch  and
Guillermo Solorzano
Geronimo Perez
Affiliation:
Materials Metrology Division/Instituto Nacional de Metrologia, Duque de Caxias, Brazil
Elisa Maria Baggio Satovitch
Affiliation:
Experimental Physics Coordination/Centro Brasileiro de Pesquisas Físicas, Rio de Janeiro, Brazil
Guillermo Solorzano
Affiliation:
Materials Engineering Department/Pontifícia Universidade Católica, Rio de Janeiro, Brazil

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 2120 - 2121
Copyright
Copyright © Microscopy Society of America 2014 

References

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[4] Pan, L, et al. , Thin Solid Films 473 (2005) 63–67.Google Scholar