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Applications of Focused Ion Beam Using FEI DualBeam DB235: How Deep Is How Small a Hole? & How to Drill It Deeper & Smaller?

Published online by Cambridge University Press:  24 July 2003

Warren J. MoberlyChan ,
Erik J. Sanchez ,
Peter R. H. Stark  and
John T. Krug
Warren J. MoberlyChan
Affiliation:
Harvard University, Center for Imaging & Mesoscale Structures, Cambridge, MA 02138
Erik J. Sanchez
Affiliation:
Portland State University, Department of Physics, Portland, OR 97207
Peter R. H. Stark
Affiliation:
Harvard Med. School, Dept of Biochemistry & Molecular Pharmacology, Cambridge, MA 02141
John T. Krug
Affiliation:
Harvard University, Dept. of Chemistry & Chemical Biology, Cambridge, MA 02138

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 886 - 887
Copyright
Copyright © Microscopy Society of America 2003