Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-23T13:02:43.466Z Has data issue: false hasContentIssue false
  • English
  • Français

Alternative Post-FIB Polishing Using Low-Energy Argon Ion Milling to Prevent Grid Redeposition

Published online by Cambridge University Press:  30 July 2021

Cecile Bonifacio ,
Pawel Nowakowski ,
Mary Ray  and
Paul Fischione
Cecile Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., United States
Pawel Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., United States
Mary Ray
Affiliation:
E.A. Fischione Instruments, Inc., United States
Paul Fischione
Affiliation:
E.A. Fischione Instruments, Inc., United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 426 - 429
Check for updates
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Giannuzzi, L. A., Geurts, R., & Ringnalda, J. (2005). 2 keV Ga+ FIB milling for reducing amorphous damage in silicon. Microscopy and Microanalysis, 11(S02), 828–829. https://doi.org/10.1017/s1431927605507797Google Scholar
Giannuzzi, L., & Stevie, F. (1999). A review of focused ion beam milling techniques for TEM specimen preparation. Micron, 30(3), 197–204. https://doi.org/10.1016/s0968-4328(99)00005-0CrossRefGoogle Scholar
Mehrtens, T., Bley, S., Venkata Satyam, P., & Rosenauer, A. (2012). Optimization of the preparation of GaN-based specimens with low-energy ion milling for (S)TEM. Micron, 43(8), 902–909. https://doi.org/10.1016/j.micron.2012.03.008CrossRefGoogle ScholarPubMed
Miyajima, N., Holzapfel, C., Asahara, Y., Dubrovinsky, L., Frost, D., Rubie, D., Drechsler, M., Niwa, K., Ichihara, M., & Yagi, T. (2009). Combining FIB milling and conventional argon ion milling techniques to prepare high-quality site-specific TEM samples for quantitative EELS analysis of oxygen in molten iron. Journal of Microscopy, 238(3), 200–209. https://doi.org/10.1111/j.1365-2818.2009.03341.xCrossRefGoogle Scholar