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Advantages of Energy Selective Secondary Electron Detection in SEM

Published online by Cambridge University Press:  01 August 2010

C Rodenburg ,
MAE Jepson  and
E Bosch
C Rodenburg
Affiliation:
University of Sheffield, United Kingdom
MAE Jepson
Affiliation:
University of Sheffield, United Kingdom
E Bosch
Affiliation:
FEI Electron Optics, The Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 622 - 623
Copyright
Copyright © Microscopy Society of America 2010