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Addressing Neon Gas Field Ion Source Instability Through Online Beam Current Estimation

Published online by Cambridge University Press:  22 July 2022

Sheila W. Seidel ,
Luisa Watkins ,
Minxu Peng ,
Akshay Agarwal ,
Christopher Yu  and
Vivek K Goyal
Sheila W. Seidel*
Affiliation:
Boston University, Department of Electrical and Computer Engineering, Boston, MA, United States Charles Stark Draper Laboratory, Cambridge, MA, United States
Luisa Watkins
Affiliation:
Boston University, Department of Electrical and Computer Engineering, Boston, MA, United States
Minxu Peng
Affiliation:
Boston University, Department of Electrical and Computer Engineering, Boston, MA, United States
Akshay Agarwal
Affiliation:
Massachusetts Institute of Technology, Department of Electrical and Computer Engineering, Cambridge, MA, United States
Christopher Yu
Affiliation:
Charles Stark Draper Laboratory, Cambridge, MA, United States
Vivek K Goyal
Affiliation:
Boston University, Department of Electrical and Computer Engineering, Boston, MA, United States
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 36 - 39
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Copyright
Copyright © Microscopy Society of America 2022

References

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The authors acknowledge funding by a Draper Fellowship, a Boston University Clare Boothe Luce Scholar Award and by the US National Science Foundation under Grant No. 1815896.Google Scholar