No CrossRef data available.
Article contents
Results from a New Fast, High Sensitivity, Eels Spectrometer
Published online by Cambridge University Press: 02 July 2020
Abstract
Last year we discussed the performance of a new parallel EELS spectrometer, the ENFINA™. The spectrometer optics have been considerably improved over past designs and the detector changed from a photodiode to a charge coupled device that was designed specifically for spectroscopy. in this work we present application examples that demonstrate some of the capabilities of the ENFINA™.
STEM spectrum imaging requires a spectrometer of high speed and sensitivity if useful data is to be collected in a short period of time. The ENFINA™ spectrometer achieves both of these through a radically improved point spread function, increased sensitivity, and fast detector readout. Useful spectrum images can be acquired in a few minutes. Figure 1 shows a dark-field STEM image of a typical semiconductor. A spectrum image containing 190 x 150 spectra was acquired from within the marked area.
- Type
- EELS Microanalysis at High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
- Information
- Copyright
- Copyright © Microscopy Society of America 2001