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Local Measurement and Computational Refinement of Aberrations for HRTEM

Published online by Cambridge University Press:  11 October 2006

Angus I. Kirkland ,
Rüdiger R. Meyer  and
Lan-Yun Shery Chang
Angus I. Kirkland
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom
Rüdiger R. Meyer
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom
Lan-Yun Shery Chang
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom
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Abstract

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

Keywords

high resolution electron microscopyaberration measurement
Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue 6: Special Issue: Frontiers of Electron Microscopy in Materials Science , December 2006 , pp. 461 - 468
Copyright
© 2006 Microscopy Society of America

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References

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