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EDX and Cathodoluminecence Depth Analysis in Ion-implanted SiO2 Layers

Published online by Cambridge University Press:  05 September 2003

H.-J. Fitting ,
M. Gaber  and
T. Barfels
H.-J. Fitting
Affiliation:
Physics Dept., University of Rostock, Universitätsplatz 3, D- 18051 Rostock, Germany
M. Gaber
Affiliation:
Physics Department, University of Alexandria, Alexandria, Egypt
T. Barfels
Affiliation:
Physics Dept., University of Rostock, Universitätsplatz 3, D- 18051 Rostock, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 104 - 105
Copyright
Copyright © Microscopy Society of America 2003

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