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Consistency Checks for X-Ray Microanalysis at Low KV

Published online by Cambridge University Press:  02 July 2020

Peter J. Statham
Peter J. Statham*
Affiliation:
Oxford Instruments Analytical Limited, Halifax Rd., High Wycombe, Bucks, HP, 12 3SE, U.K.
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Abstract

This work proposes a new consistency check total based on measurement of bremsstrahlung intensity which can be used to validate analyses even when concentrations have been normalised to 100%.

If elemental content of a material is unknown, spectral peaks have to be identified, either interactively, or by automatic procedures. When peak overlap is severe (e.g. Si K/ Ta M / W M, Al K/Br L), it is easy for an element to be misidentified or missed altogether and at low beam kV, some elements will not even produce a characteristic line suitable for analysis. When element identification or quantification requires deconvolution of closely spaced lines, minor miscalibration or inaccurate peak modelling produces inaccurate peak area estimates, Ai, instead of true peak areas, Ai*, and consequently inaccurate concentration estimates, Ci* . A common consistency check is to confirm that the analysis total is close to unity:

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 712 - 713
Copyright
Copyright © Microscopy Society of America 2001

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References

1.Newbury, D.E., Microscopy and Microanalysis, 13, supp.2, Springer (1997),Google Scholar
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3.Statham, P.J., Inst. Phys. Conf. Ser. No 165, Symposium 14,Proc. IUMAS 2000 (2000), 415CrossRefGoogle Scholar