High surface area tungsten oxynitride has been prepared by the temperature programmed reaction (TPR) of WO3 with NH3. All samples were characterized by x-ray diffraction (XRD), nitrogen physisorption, CO chemisorption, and elemental analysis. Samples were prepared at different heating rates (β), and a Redhead analysis yielded an activation energy for nitridation of 109 kJ mol−1. A heating rate of 0.016 K s−1 gave optimal synthesis conditions. Solid state intermediates were studied by interrupting the temperature program at various stages. No distinct suboxide phases were found using XRD. The nitridation step was determined to be a continuous transformation from oxide to oxynitride. Surface area, CO uptake, and nitrogen weight % were all found to increase as the reaction progressed. Reactivity experiments showed reasonable hydrodeoxygenation (HDO) and hydrodenitrogenation (HDN) activity, but little hydrogenation (HYD) or hydrodesulfurization (HDS) activity.