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Mechanical properties and thermal stability of (NbTiAlSiZr)Nx high-entropy ceramic films at high temperatures

Published online by Cambridge University Press:  12 October 2018

Qiu-Wei Xing Open the ORCID record for Qiu-Wei Xing [Opens in a new window] ,
Song-Qin Xia ,
Xue-Hui Yan  and
Yong Zhang Open the ORCID record for Yong Zhang [Opens in a new window]
Qiu-Wei Xing
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Song-Qin Xia
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Xue-Hui Yan
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Yong Zhang*
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China; and Beijing Key Laboratory for Magneto-Photoelectrical Composite and Interface Science, University of Science and Technology Beijing, Beijing 100083, China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

High-entropy ceramic (HEC) films refer to the carbide, boride, oxide, or nitride films of the high-entropy alloy, which have potential applications under high temperatures. In this study, we fabricated the HEC NbTiAlSiZrNx films using magnetron sputtering under various deposition atmospheres. The phase structure evolution and the mechanical properties of three HEC films under high temperatures were investigated. The HEC films demonstrated good thermal stability as well as high hardness. After annealing for 24 h at 700 °C, the films remained in an amorphous phase without obvious crystallization, and the hardness of the films declined. Nanocrystallizations occurred in films deposited at a nitrogen flow rate of 4 sccm and 8 sccm after annealing for 30 min at 900 °C and exhibited an face-centered cubic structure. HEC NbTiAlSiZrNx films have potential applications as protective coatings under high temperatures.

Keywords

thin filmamorphoushardness
Type
Article
Information
Journal of Materials Research , Volume 33 , Issue 19: Focus Issue: Fundamental Understanding and Applications of High-Entropy Alloys , 14 October 2018 , pp. 3347 - 3354
Copyright
Copyright © Materials Research Society 2018 

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