The goal of this article is first to review the charging effects
occurring when an insulating material is subjected to electron
irradiation in a scanning electron microscope (SEM) and next their
consequences from both scanning electron microscopy and electron probe
microanalysis (EPMA) points of view. When bare insulators are observed,
the so-called pseudo mirror effect leads to an anomalous contrast and
also to an erroneous surface potential,
VS, measurement when a Duane–Hunt
limit (DHL) method is used. An alternative possibility is to use an
electron toroidal spectrometer (ETS), specially adapted to a SEM, which
directly gives the VS value. In the case
of a bulk specimen coated with a grounded layer, although the layer
prevents external effects of the trapped charge, the electric field
beneath the coating is reinforced and leads to loss of ionizations that
reduces the number of generated X-ray photons. To take into account
both effects mentioned above, whether the studied insulator is coated
or not, a method is proposed to deduce the trapped charge inside the
insulator and the corresponding internal or external electric field.