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  • Do We Need Three-Dimensional Fourier Transform Analysis to Evaluate High-Performance TEMs?

  • Kazuo Ishizuka, Koji Kimoto
  • Journal:
    Microscopy Today / Volume 26 / Issue 2 / March 2018
    Published online by Cambridge University Press:
    15 March 2018, pp. 42-49
    Print publication:
    March 2018
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  • Linear image transfer down to a few tens of pm can be attained by a modern Cs-corrected transmission electron microscope. However, it is difficult to accurately evaluate such a high-performance microscope. We examine three-dimensional (3D) Fourier transform (FT) analysis in comparison with diffractogram (2D FT) analysis to evaluate aberration-corrected electron microscopes. The 3D FT can analyze information transfer on the Ewald sphere up to high-angles using a thick sample or a sample containing strong scattering elements. Therefore, the 3D FT analysis is necessary to evaluate Cs-corrected microscopes, especially those equipped with a Cc-corrector, or a monochromator, or microscopes operated at lower voltages.