Linear image transfer down to a few tens of pm can be attained by a modern Cs-corrected transmission electron microscope. However, it is difficult to accurately evaluate such a high-performance microscope. We examine three-dimensional (3D) Fourier transform (FT) analysis in comparison with diffractogram (2D FT) analysis to evaluate aberration-corrected electron microscopes. The 3D FT can analyze information transfer on the Ewald sphere up to high-angles using a thick sample or a sample containing strong scattering elements. Therefore, the 3D FT analysis is necessary to evaluate Cs-corrected microscopes, especially those equipped with a Cc-corrector, or a monochromator, or microscopes operated at lower voltages.
