The energy-dispersive Si(Li) X-ray spectrometer, introduced 30 years
ago into electron probe mi-croanalysis (EPMA) by R. Fitzgerald et al., has
profoundly affected the development of microanalysis. It offers many
advantages over the wavelength-dispersive crystal spectrometer. It has no
moving parts and covers the full energy range of interest in EPMA. There
is no defocusing over large distances on the specimen, the efficiency of
the device is high, varies slowly and continuously with atomic number, and
can be predicted fairly accurately, and, most importantly, all emission
lines are detected and can be observed simultaneously. The one remaining
disadvantage of the Si(Li) spectrometer is its poorer energy resolution.
Solid-state detection devices now under development promise to achieve
resolution comparable to that of the crystal spectrometer.