Spectral imaging in the scanning electron microscope (SEM)
equipped with an energy-dispersive X-ray (EDX) analyzer has
the potential to be a powerful tool for chemical phase
identification, but the large data sets have, in the past, proved
too large to efficiently analyze. In the present work, we describe
the application of a new automated, unbiased, multivariate
statistical analysis technique to very large X-ray spectral
image data sets. The method, based in part on principal components
analysis, returns physically accurate (all positive) component
spectra and images in a few minutes on a standard personal
computer. The efficacy of the technique for microanalysis is
illustrated by the analysis of complex multi-phase materials,
particulates, a diffusion couple, and a single-pixel-detection
problem.