In the microelectronic semiconductor world we are bombarded with
reports of how the drive toward faster, denser, lower power-consuming and
more reliable semiconductor products will accelerate with time. This paper
discusses the instrumental evolution from visible light microscopy to
scanning electron microscopy and on to transmission electron microscopy
and scanned probe microscopy. The increased demands placed on specimen
preparation of precise locations in a semiconductor chip for microscopy
are discussed. Analytical microscopy has to be timely in order to be a
viable adjunct to semiconductor manufacturing. The factors governing
analysis of turn-around time are explained and an optimum strategy is
suggested for effective utilization of finite laboratory resources. The
new instrumentation available to the microscopist is introduced along with
an overview of the exciting new analyses that will be available in the
immediate future.