We describe here real-time, in situ observations of the formation of
nanosize germanium (Ge) islands on silicon (Si). The deposition of Ge onto
electron-transparent Si(100) takes place in a UHV transmission electron
microscope that has been modified to allow chemical vapor deposition to be
carried out in the polepiece. We recorded the growth process at video rate
and were therefore able to follow the evolution of individual islands. As
the islands grew, we observed a coarsening process similar to classical
Ostwald ripening, but which leads at certain times to a bimodal
distribution of island sizes. We show that this phenomenon can be
understood using a model in which a conventional coarsening process is
modified by a transition between two different island shapes.