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Atom Probe Tomography Characterization of Dopant Distributions in Si FinFET: Challenges and Solutions
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- Journal:
- Microscopy and Microanalysis / Volume 26 / Issue 1 / February 2020
- Published online by Cambridge University Press:
- 22 November 2019, pp. 36-45
- Print publication:
- February 2020
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- Article
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