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1 results

  • Gas Cascade Amplification in Ultra-High-Resolution Environmental Scanning Electron Microcopy

  • Milos Toth, Bradley L. Thiel, W. Ralph Knowles
  • Journal:
    Microscopy and Microanalysis / Volume 16 / Issue 6 / December 2010
    Published online by Cambridge University Press:
    03 September 2010, pp. 805-809
    Print publication:
    December 2010

  • We describe a feedback mechanism in the gas cascade amplification process used in magnetic immersion lens environmental scanning electron microcopy (ESEM). Feedback dominates gas gain under the conditions typically used for ultra-high-resolution ESEM and gives rise to novel dependencies of the imaging signal and noise on microscope operating parameters. It is ascribed tentatively to the generation of free electrons upon de-excitation of metastable species in the gas cascade. The results have implications for optimization of ESEM systems for applications such as critical dimension metrology and real-time imaging of nanostructure growth by gas mediated electron beam induced deposition.