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Oxide Impurities in Silicon Oxide Intermetal Dielectrics and Their Potential to Elevate Via-Resistances
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue 4 / August 2014
- Published online by Cambridge University Press:
- 12 May 2014, pp. 1271-1275
- Print publication:
- August 2014
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- Article
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