A Nion spherical-aberration (Cs) corrector was recently installed on
Lehigh University's 300-keV cold field-emission gun (FEG) Vacuum
Generators HB 603 dedicated scanning transmission electron microscope
(STEM), optimized for X-ray analysis of thin specimens. In this article,
the impact of the Cs-corrector on X-ray analysis is theoretically
evaluated, in terms of expected improvements in spatial resolution and
analytical sensitivity, and the calculations are compared with initial
experimental results. Finally, the possibilities of atomic-column X-ray
analysis in a Cs-corrected STEM are discussed.