The pressure of crack-shaped cavities formed in silicon upon
implantation with helium and subsequent annealing is quantitatively
determined from the measurement of diffraction contrast features
visible in transmission electron micrographs taken under well-defined
dynamical two-beam conditions. For this purpose, simulated images,
based on the elastic displacements associated with a Griffith crack,
are matched to experimental micrographs, thus yielding unambiguous
quantitative data on the ratio p/μ of the cavity
pressure to the silicon matrix shear modulus. Experimental results
demonstrate cavity radii of some 10 nm and p/μ values
up to 0.22, which may be regarded as sufficiently high for the emission
of dislocation loops from the cracks.