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The effect of radio frequency power on the structural and optical properties of a-C:H films prepared by PECVD
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- Journal:
- Journal of Materials Research / Volume 32 / Issue 7 / 14 April 2017
- Published online by Cambridge University Press:
- 16 January 2017, pp. 1231-1238
- Print publication:
- 14 April 2017
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- Article
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