X-ray optics have been used in X-ray analytical instruments for
several years. Applications of X-ray optics have been reported in X-ray
diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy.
X-ray optics have been used to increase the X-ray flux incident on the
sample or to direct and focus emitted X-rays from a sample. We report here
the use of a grazing incidence optic (GIO) as a flux-enhancing collimator
for use with an energy-dispersive (ED) detector used to perform electron
beam microanalysis. We found that the GIO in combination with an ED
spectrometer (EDS) provides substantial intensity gain for X-ray lines
with energy below 1 keV. The GIO is also found to provide a modest focus
effect, and introduces minimal spectral artifacts.