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Changes in structures and electrical conduction mechanisms of chemical vapor deposited Ta2O5 thin films by annealing under O3 atmosphere with ultraviolet light radiation
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- Journal:
- Journal of Materials Research / Volume 19 / Issue 5 / May 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1516-1523
- Print publication:
- May 2004
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- Article
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