Along with rapidly developing nanotechnology, new types of analytical
instruments and techniques are needed. Here we report an alternative
procedure for electrical measurements on semiconductor nanowhiskers,
allowing precise selection and visual control at close to atomic
resolution. We use a combination of two powerful microscope techniques,
scanning tunneling microscopy (STM) and simultaneous viewing in a
transmission electron microscope (TEM). The STM is mounted in the
sample holder for the TEM. We describe here a method for creating an
ohmic contact between the STM tip and the nanowhisker. We examine three
different types of STM tips and present a technique for cleaning the
STM tip in situ. Measurements on 1-μm-tall and 40-nm-thick
epitaxially grown InAs nanowhiskers show an ohmic contact and a
resistance of down to 7 kΩ.