This paper presents a model-based approach for the first time to identify the crack location for the hinge-based planar RRR compliant mechanism, a parallel micro-motion stage driven by piezoelectric (PZT) actuators. However, cracks more likely occur on a flexure hinge because it usually undergoes a periodic deformation in service, which eventually compromises mechanism's performance, positioning accuracy for instance. In this work, the pseudo-rigid-body method is used to develop kinematic and dynamic models of the RRR mechanism both in healthy and damaged conditions, where the crack is considered in terms of the rotational compliance of a flexible hinge. The crack location is determined by measuring PZT elongations, which represents the driving toque deviation because of the crack presence. Numerical simulation is conducted to verify the proposed approach, and the results show good match of the identified crack location with the assumed location. Finally, experiments on the RRR mechanism with a prefabricated crack is performed to further validate the proposed models; the experimental results yield a good consistence.