This article presents two types of a hollow-cathode plasma
source based on an arc discharge where the electrons emitted
either by a hot filament or by a surface-discharge-based trigger
system initiate a gas arc discharge. The sources produce gas
plasmas of densities 1010–1012
cm−3 in large volumes of up to 0.5 m3 at
a discharge current of 100–200 A and at a pressure of
10−1–10−2 Pa. Consideration
is given to some peculiarities of the operation of the plasma
sources with various working gases (Ar, N2,
O2). The erosion rate of the cold hollow cathode
in the designed plasma sources is shown to be 10 times lower
than that found in an ordinary one. The sources are employed
for plasma-assisted surface modification of solids.