Results on using X-ray optics with a monocapillary attached to a microfocus Mo X-ray tube for a high-intensity XRF analysis are reported. Au-coated glass monocapillaries with 400 and 700 μm inner diameters were used to obtain focused and intensive incident Mo X-rays for the measurements of XRF intensities from pure metal samples. Intensity enhancements obtained by using the Au-coated monocapillaries were found to be up to 1.5 times higher than those obtained by using similar inner diameter uncoated glass capillaries. The XRF intensity profiles were measured by the wire scanning method to investigate the reasons. The traces of the incident X-rays were calculated by taking into account of X-ray total reflection of the incident X-rays from the inner wall of the capillaries. The calculated XRF intensity profiles agree with those of the measured XRF intensity profiles. The observed enhancements in XRF intensity were the results of the incident X-rays emitted from the Mo X-ray tube being totally reflected on the inner wall of the Au-coated monocapillaries.
