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Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering
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- Journal:
- Microscopy and Microanalysis / Volume 22 / Issue 3 / June 2016
- Published online by Cambridge University Press:
- 12 April 2016, pp. 673-678
- Print publication:
- June 2016
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- Article
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