2 results
Resolution Performance of Programmable Proximity Aperture MeV Ion Beam Lithography System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1020 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1020-GG03-04
- Print publication:
- 2007
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Tert-butylamine and Allylamine as Reductive Nitrogen Sources in Atomic Layer Deposition of TaN Thin Films
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- Journal:
- Journal of Materials Research / Volume 17 / Issue 1 / January 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 107-114
- Print publication:
- January 2002
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