10 results
Bonding Characterization of Oxidized PDMS Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U8.3
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- 2003
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Wafer Bonding Using Dielectric Polymer Thin Films in 3D Integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 710 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, DD12.18.1
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- 2001
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Programmed substrate temperature ramping to increase nucleation density and decrease surface roughness during metalorganic chemical vapor deposition of aluminum
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 5 / May 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1982-1989
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- May 1999
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Study of Factor and Interaction Effects During Programmed Rate Chemical Vapor Deposition of Aluminum
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 121
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- 1998
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The Roles of “3d/2d” and “3d/3d” Topography Simulators in Virtual Wafer Fabs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 490 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 201
- Print publication:
- 1997
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The Effects of Temperature Ramping on MOCVD Al Film Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 472 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 337
- Print publication:
- 1997
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Modeling of Collimateti Titanium Nitride Physical Vapor Deposition using a Combined Specular-Diffuse Formulation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 575
- Print publication:
- 1994
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Estimating Local Deposition Conditions and Kinetic Parameters Using Film Profiles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 393
- Print publication:
- 1992
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Impacts of Temperature and Reactant Flow Rate Transients on LPCVD Tungsten Silicide Film Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 171
- Print publication:
- 1991
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Unified Model for Ballistic Transport and Gas-Solid Reactions in Features
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 375
- Print publication:
- 1990
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