3 results
Methodology to Determine the Toughness of a Brittle Thin Film by Nanoindentation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F02-07
- Print publication:
- 2006
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Mobility Enhancement by Strained Nitride Liners for 65nm CMOS Logic Design Features
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- Journal:
- MRS Online Proceedings Library Archive / Volume 913 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0913-D02-02
- Print publication:
- 2006
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Channel Cracking Technique For Toughness Measurement Of Sioch Low-K Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F03-05
- Print publication:
- 2006
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