In this article we discuss the applicability of global
scattering functions for structure analysis of Grazing Incidence Small Angle
X-ray Scattering (GISAXS) data. Contrary to rigorous analysis of the full
2-D detector image, which can be performed with complex simulation models,
the global scattering functions described here will be used to model
transverse detector scans in the $q_{\parallel}$ reciprocal scattering
planes. In contrast to a full GISAXS analysis, this procedure cannot explain
structural features perpendicular to the sample plane. The discussed method
is useful for the analysis of weakly correlated films. These films are e.g.
found in polymer inorganic composite materials based on commercially
available nanoparticles. In hybrid material systems polydisperse structures,
including particle aggregates without precisely defined shape are formed.
The pictured approach, which models scattering in terms of structural
levels, has been previously applied with success in conventional
transmission SAXS geometry. It is based on conventional exponential and
power laws. Hence, data analysis becomes less complex compared to simulation
approaches. Here we examine if this unified fitting model can be used to
model diffuse, non specular scattering resulting from GISAXS. In this
context the applicability and limit of its application to diffuse scattering
in the GISAXS geometry is discussed. Furthermore diffuse $q_{\parallel}$
scattering from different ideal particle types is simulated and compared
with fitted results. To verify our approach, fit results from experimental
GISAXS curves obtained for real samples are compared with results from
Scanning Probe Microscopy and Scanning Electron Microscopy studies. The
samples investigated range from evaporated Au films to hybrid
TiO2/polymer films and demonstrate the usefulness in the structural
analysis of complex films.