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Aluminum Particle Formation in the GaS Phase of a Low Pressure Chemical Vapor Deposition Reactor Using Dimethylethylamine Alane (AlH3) as a Precursor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 317
- Print publication:
- 1992
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- Article
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